Radiation-enhanced self- and boron diffusion in germanium
نویسندگان
چکیده
منابع مشابه
Radiation-enhanced self- and boron diffusion in germanium
We report experiments on proton radiation-enhanced selfand boron (B) diffusion in germanium (Ge) for temperatures between 515 ◦C and 720 ◦C. Modeling of the experimental diffusion profiles measured by means of secondary ion mass spectrometry is achieved on the basis of the Frenkel pair reaction and the interstitialcy and dissociative diffusion mechanisms. The numerical simulations ascertain con...
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ژورنال
عنوان ژورنال: Physical Review B
سال: 2013
ISSN: 1098-0121,1550-235X
DOI: 10.1103/physrevb.87.115202